Research

Precision Mechatronics

My overarching goal is to advance the understanding of mechatronic systems and mechatronic design, including actuation, metrology, control, and system engineering, with a strong emphasis on both hardware realization and the underlying design process.

Research Vision

My research aims to extend classical precision engineering design principles toward modern, multidisciplinary mechatronic principles. Systems in the high-tech domain increasingly require accuracy, reproducibility, throughput, and cost efficiency to improve simultaneously. Meeting these demands calls for a rethink of how mechanical, electrical, and control subsystems are designed and integrated.

A recurring theme in my work is the mechatronic integration of mechanical systems: transforming traditionally passive components into active elements within a mechatronic system to enhance performance while maintaining minimal complexity. This requires a deep understanding of hardware design alongside actuation, sensing, and control at the system level.

Much of my research is carried out in close collaboration with industrial partners in the semiconductor equipment, scientific instrumentation, and medical technology domains. Application-driven projects give rise to fundamental research questions, and the insights gained in turn enable better-performing, more reproducible systems across a wide range of applications.

Three research pillars

Pillar I: High-Performance Mechatronic Systems

Design and development of high-performance mechatronic systems and scientific instrumentation. This pillar pushes the boundaries of what is achievable through integrated design, transforming passive components into active elements and developing system architectures that meet extreme performance requirements. It generates novel system concepts and identifies the fundamental challenges addressed in Pillar II.

Pillar II: Fundamental Mechatronics

Development of fundamental concepts, design rules, and principles in mechatronics. Typically derived from application-driven research in Pillar I, these fundamentals improve the understanding of mechatronic systems and create impact across all three pillars. Topics include actuation principles, transmission design, structural dynamics, mechatronic architecture, and precision design methodology.

Pillar III: Cross-Boundary Mechatronics

Applying mechatronic principles in adjacent disciplines, such as fluid systems, optics, metrology, and large-scale research infrastructure. These cross-boundary applications both enrich mechatronic methodology with new insights and demonstrate the broad relevance of precision mechatronic design beyond its traditional domains.

Typical research projects span multiple pillars. Application-driven projects are primarily positioned in Pillars I and II, where concrete systems give rise to fundamental research questions that are addressed in Pillar II, resulting in new insights and design principles. Cross-boundary projects (Pillar III) both benefit from and contribute to the methodologies developed in Pillar II.

Publications

Complete list. Also available on the TU/e Research Portal and ORCID.

Journal Articles

  1. de Bruijn, R.G.C. Design Principles for the Next Generation. Mikroniek, Vol. 2025, No. 6. Feb 2026. TU/e PortalPDF
  2. de Bruijn, R. Beyond Inertial Match: Optimal transmission ratio values for a payload subject to additional forces. Mikroniek, Vol. 63, No. 2, pp. 5-10. Apr 2023. TU/e PortalPDF

Conference Papers

  1. Romberg, T.L., de Bruijn, R.G.C., van den Eijnden, S.J.A.M., van de Wijdeven, J.J.M., Heertjes, M.F., Vermeulen, J.P.M.B. Bumpless Transfer Control of a Piezoelectric Wafer Stage with Variable Stiffness Device. 40th Annual Meeting of the American Society for Precision Engineering (ASPE 2025), San Diego, pp. 435-436. Nov 2025. TU/e PortalPDF
  2. de Bruijn, R.G.C., van de Wijdeven, J.J.M., Vermeulen, J.P.M.B. Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness. 39th Annual Meeting of the American Society for Precision Engineering (ASPE 2024), Houston, pp. 21-25. Nov 2024. TU/e PortalPDF
  3. de Bruijn, R.G.C., Vermeulen, J.P.M.B., van de Wijdeven, J.J.M. Piezoelectric Wafer Stage Based on Highly Variable Viscoelastic Stiffness. 38th Annual Meeting of the American Society for Precision Engineering (ASPE 2023), Boston, pp. 1-6. Nov 2023. TU/e PortalPDF
  4. de Bruijn, R.G.C., van de Wijdeven, J.J.M., Vermeulen, J.P.M.B. Enabling piezoelectric wafer stages with highly variable stiffness device for next-generation semicon equipment. 2023 DSPE Conference on Precision Mechatronics, Sint Michielsgestel, pp. 49-53. Sept 2023. TU/e PortalPDF

Thesis

  1. de Bruijn, R.G.C. A piezoelectric wafer stage: for electron beam inspection systems. PhD Thesis, Eindhoven University of Technology. Nov 2025. TU/e PortalPDF

Patents

  1. Bustraan, K.F., Finney, N.R., Delpuerto, S.E., Yang-Shan, H., de Bruijn, R.G.C., Burroughs, J.R. Systems and methods for motion control in a semiconductor manufacturing apparatus. Patent WO2025093202. May 2025. TU/e PortalPDF
  2. de Goeij, J., de Bruijn, R., Vermeulen, J.P.M.B., Leenaars, R.W.A.H., Jansen, B. Lithographic apparatus stage coupling. Patent WO2023078788. May 2023. TU/e PortalPDF
  3. Custers, K., de Bruijn, R.G.C., Kruizinga, M., Schijvenaars, L.A. Pellicle Frame for EUV Lithography. Patent WO2021213777A1. Oct 2021. TU/e PortalPDF